Quantitative Modeling and Measurement of Copper Thin Film Adhesion

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Quantitative Modeling and Measurement of Copper Thin Film Adhesion

Numerous mechanisms have been identified as fundamental to the adhesion of thin metallic films. The primary mechanism is the thermodynamic work of adhesion of the interface, which in its most basic description is the difference between the surface energies of the two materials and that of the interface. This quantity is often described as leveraging the contributions of other mechanisms. One of...

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3 To my beloved parents and family 4 ACKNOWLEDGMENTS Dr. Crisalle is the chair of my supervisory committee and I express my sincere appreciation for his guidance and constant encouragement through the last five years. I am also obliged to thank Dr. Hoflund, Dr. Svoronos and Dr. Eisenstadt for their valuable discussions and serving as my research committee members. Of course my gratitude should ...

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ژورنال

عنوان ژورنال: MRS Proceedings

سال: 1998

ISSN: 0272-9172,1946-4274

DOI: 10.1557/proc-539-277